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Process parameter impact on properties of sputtered large-area Mo bilayers for CIGS thin film solar cell applications
2015 (Engelska)Ingår i: Thin Solid Films, Vol. 589, s. 79-84Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

Copper indium gallium selenide (CIGS) has emerged as a promising candidate for thin film solar cells, with efficiencies approaching those of silicon-based solar cells. To achieve optimum performance in CIGS solar cells, uniform, conductive, stress-free, well-adherent, reflective, crystalline molybdenum (Mo) thin films with preferred orientation (110) are desirable as a back contact on large area glass substrates. The present study focuses on cylindrical rotating DC magnetron sputtered bilayer Mo thin films on 300 mm × 300 mm soda lime glass (SLG) substrates. Key sputtering variables, namely power and Ar gas flow rates, were optimized to achieve best structural, electrical and optical properties. The Mo films were comprehensively characterized and found to possess high degree of thickness uniformity over large area. Best crystallinity, reflectance and sheet resistance was obtained at high sputtering powers and low argon gas flow rates, while mechanical properties like adhesion and residual stress were found to be best at low sputtering power and high argon gas flow rate, thereby indicating a need to arrive at a suitable trade-off during processing. © 2015 Elsevier B.V.

Ort, förlag, år, upplaga, sidor
2015. Vol. 589, s. 79-84
Nyckelord [en]
Argon; Biomechanics; Characterization; Conductive films; Economic and social effects; Flow of gases; Glass; Indium; Ionization of gases; Molybdenum; Optical properties; Solar cells; Stresses; Substrates, CIGS; Electrical and optical properties; Large-area glass substrate; Optimum performance; Preferred orientations; Soda lime glass substrate; Thickness uniformity; Thin film solar cells, Thin films
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URN: urn:nbn:se:hv:diva-8542DOI: 10.1016/j.tsf.2015.04.046OAI: oai:DiVA.org:hv-8542DiVA, id: diva2:860181
Tillgänglig från: 2015-10-10 Skapad: 2015-10-10 Senast uppdaterad: 2016-02-15Bibliografiskt granskad

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